摘要 |
PCT No. PCT/SE86/00233 Sec. 371 Date Jan. 16, 1987 Sec. 102(e) Date Jan. 16, 1987 PCT Filed May 20, 1986 PCT Pub. No. WO86/07192 PCT Pub. Date Dec. 4, 1986.An integrated semiconductor circuit including at least two mutually separated wafer parts (3, 4) of semiconductor material and conductors (7) for establishing electrical conection between the wafer parts is disclosed with a thermally insulating jointing substance (9) which is applied across the gap between the wafer parts (3, 4) for holding these parts together. The jointing substance (9) is mechanically supporting for holding the wafer parts (3, 4) together, and the conductors (7) are so dimensioned that they have a negligible supporting function as compared with the jointing substance (9). A method for producing such a cirucit and the use of the circuit for providing a flow meter for measuring the flow velocity of a flowing gaseous or liquid medium are also disclosed. |