发明名称 Method for contacting a narrow width PN junction region
摘要 A method for making contact to a narrow width PN junction region in any desired semiconductor body is described. A substantially vertical conformal conductive layer is formed over the desired PN junction region. The body is heated at a suitable temperature to cause a dopant to diffuse from the vertical conductive layer into the semiconductor body to form the narrow width PN junction region. A substantially horizontal conductive layer makes contact to the substantially vertical layer so as to have the horizontal conductive layer in electrical contact to the PN junction region. Electrical contact can be made to the horizontal conductive layer at any convenient location. A lateral PNP transistor is one type of very small device that can be made using the method of the present invention.
申请公布号 US4507171(A) 申请公布日期 1985.03.26
申请号 US19820405844 申请日期 1982.08.06
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BHATIA, HARSARAN S.;BHATIA, SATYAPAL S.;RISEMAN, JACOB;VALSAMAKIS, EMMANUEL A.
分类号 H01L29/73;H01L21/225;H01L21/285;H01L21/331;H01L23/485;H01L29/735;(IPC1-7):H01L21/306;B05D5/12;B44C1/22 主分类号 H01L29/73
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