| 摘要 |
PURPOSE:To acquire sufficient amount of X-ray to an object to be irradiated by irradiating a target with electron beams from two or more electron guns and by integrally providing two or more X-ray sources. CONSTITUTION:An X-ray tube 1 is provided with two or more electron guns such as electron guns 2, 3, etc., one water-cooled copper target 4 and Be X-ray windows 5, 6. The target 4 is irradiated with the electron beams from the electron guns 2, 3, forming two or more X-ray sources. The X-rays 7, 8 from two or more X-ray sources transfer a figure of X-ray mask 9 to the resist 11 on the Si wafer 10 through the X-ray mask. |
