发明名称 Semiconductor device with a gray tin layer and a method of making the same
摘要 Epitaxial thin layers of alpha -tin are grown by vapor phase epitaxy upon lattice-matched substrates of InSb or CdTe by the thermal decomposition of stannane. By using substrates of smaller lattice constant it is possible to modify the process to deposit alpha -tin germanium alloys.
申请公布号 US4445129(A) 申请公布日期 1984.04.24
申请号 US19810303337 申请日期 1981.09.18
申请人 INTERNATIONAL STANDARD ELECTRIC CORPORATION 发明人 GOODMAN, COLIN H. L.
分类号 H01L31/0264;C30B25/02;H01L21/205;H01L31/10;H01S5/00;(IPC1-7):H01L29/16 主分类号 H01L31/0264
代理机构 代理人
主权项
地址