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发明名称
FILM FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE, PROGRAM AND RECORDING MEDIUM
摘要
申请公布号
KR100889401(B1)
申请公布日期
2009.03.20
申请号
KR20077009588
申请日期
2007.04.27
申请人
发明人
分类号
H01L21/28;H01L21/205
主分类号
H01L21/28
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代理人
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