| 摘要 |
PURPOSE:To improve the productivity of vapor deposited films by providing a shielding body movably between the vessels of evaporating sources and cylindrical bodies extended with a filmlike base material and making the formation of vapor deposited thin films possible in both forward and backward ways of the base material. CONSTITUTION:A titled device consisting of two pieces of cylindrical bodies 3, 3' provided freely rotatably in a vacuum atmosphere, vessels 6 of evaporating sources contg. evaporating materials 7 below the spacing between the bodies 3, 3' and a shielding plate 15 provided movably between the vessels 6 and the bodies 3, 3'. When a filmlike base material 4 is run in a direction A, an evaporating material 7'' is evaporated to form an intermediate thin film on the material 4 on the body 3'. At the same time, the plate 15 is moved leftward to deposit the vapor of the material 7 from the vessel 6 on the material 4 which travels on the surface of the body 3. Thereafter, the plate 15 is moved rightward and the material 4 is run in a direction B, so that the materials 7' and 7 are vapor deposited in the same way as mentioned above. Thus, multilayered thin films are vapor deposited efficiently on the material 4. |
