| 发明名称 |
LITHOGRAPHIC MASK |
| 摘要 |
Large area random and mosaic arrays of identical submicron microcolumnar structures can be produced on surfaces by directionally ion etching a monolayer film of spherical colloidal particles. |
| 申请公布号 |
AU9197482(A) |
申请公布日期 |
1983.07.07 |
| 申请号 |
AU19820091974 |
申请日期 |
1982.12.30 |
| 申请人 |
EXXON RESEARCH AND ENGINEERING CO. |
发明人 |
HARRY WILLIAM DECKMAN;JOHN HENRY DUNSMUIR |
| 分类号 |
B41M5/24;G03F7/004;G03F7/16;H01L21/308 |
主分类号 |
B41M5/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
