MQW DEVICE, IC CHIP, AND OPERATION METHOD FOR SEMICONDUCTOR PATTERNING SYSTEMS

摘要

Multiple-quantum-well (MQW) devices, integrated circuit (IC) chips, and operating methods can be used in a semiconductor lithography patterning system. The MQW device includes an array of pixels having transmission elements and associated support circuits. The support circuits have preliminary memory cells and final memory cells. The final memory cells store transmittance values for controlling transmittance values of the associated transmission elements. In the manner of the method, exposure of a target with a lithography system for a purpose of patterning the target can be performed through the transmission elements according to the controlled transmittances, while subsequent transmittance values are received by the preliminary memory cells from memory banks. The exposure of the target needs to pause for less time, in order to wait for the MQW device to be refreshed with the subsequent transmittance values. Accordingly the whole semiconductor lithography patterning system can operate faster and thus have an improved throughput.