METHOD OF AUTOMATIC FOCUSING CHARGED PARTICLE BEAM,申请号SU19803226543-传众专利搜索

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发明名称	METHOD OF AUTOMATIC FOCUSING CHARGED PARTICLE BEAM
摘要
申请公布号	SU940260(A1)	申请公布日期	1982.06.30
申请号	SU19803226543	申请日期	1980.12.29
申请人	TUR VLADIMIR A,SU;SHTANICHEVA GALINA,SU	发明人	TUR VLADIMIR A,SU;SHTANICHEVA GALINA I,SU
分类号	H01J37/24;(IPC1-7):H01J37/24	主分类号	H01J37/24
代理机构		代理人
主权项
地址

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