LIQUID PHASE EPITAXIAL GROWTH DEVICE,申请号JP19810153532-传众专利搜索

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发明名称	LIQUID PHASE EPITAXIAL GROWTH DEVICE
摘要
申请公布号	JPS5788093(A)	申请公布日期	1982.06.01
申请号	JP19810153532	申请日期	1981.09.28
申请人	SIEMENS SCHUCKERTWERKE AG	发明人	YOTSUHIEN HAINEN
分类号	C30B19/00;C30B19/06;H01L21/02;H01L21/208	主分类号	C30B19/00
代理机构		代理人
主权项
地址

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