| 摘要 |
PURPOSE:To obtain the standard leakage value in a short time, by linking one-way to the exhaust unit with the branch tube, others to the instrument unit to be corrected, through the sluice valve as a three-way valve, and by opening the three-way valve to the branch tube side and the three-way valve to the branch tube side for vent. CONSTITUTION:The standard leakage unit 1 side is closed with the valve 6a of the three-way valve 6, and the tank 3 and the branch tube 7 side are evacuated with the discharge pump 4. Next, the tank 3 is closed with the valve 6a, the standard leakage unit 1 and the branch tube 7 are tied with the valve 6a closing the tank 3 and discharge is made with the discharge pump 4. At calibration, the branch tube 7 side is closed with the valve 6a to calibrate the instrument unit 5. |
