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发明名称
摘要
申请公布号
JPS5437474(B1)
申请公布日期
1979.11.15
申请号
JP19680040071
申请日期
1968.06.10
申请人
发明人
分类号
H01L23/50;H01L21/00;H01L21/60;H01L23/36;H01L23/482;H01L27/00;(IPC1-7):H01L21/00
主分类号
H01L23/50
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代理人
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