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经营范围
发明名称
ELECTRON BEAM UNIT
摘要
申请公布号
JPS5458366(A)
申请公布日期
1979.05.11
申请号
JP19770125281
申请日期
1977.10.19
申请人
CHO LSI GIJUTSU KENKYU KUMIAI
发明人
KAWABUCHI KATSUHIRO
分类号
G21K5/04;B23K15/00;H01L21/027;H01L21/26
主分类号
G21K5/04
代理机构
代理人
主权项
地址
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