| 摘要 |
PURPOSE:To facilitate the chip formation of a piezoelectric thin film resonator and the axial reading by forming each lead electrode for an upper electrode and a lower electrode of the piezoelectric thin film at both sides of a support base to the piezoelectric thin film. CONSTITUTION:The piezoelectric thin film 14 is supported to one major surface 11a of the support base 11 made of a sintered body including zinc oxide and a recess 18 toward the vibration region 21 placed between the lower electrode 12 and the upper electrode 15 formed respectively to the lower face and the upper face of the piezoelectric thin film 14 from the other major surface 11b is formed to the support base 11. The vibration region 21 of the piezoelectric thin film 14 is supported on the recess 18 of the support base 11 in a way possible for thickness vibration. Thus, the lead electrodes 23, 24 for the lower electrode 12 and the upper electrode 14 of the piezoelectric thin film 14 are formed at both sides of the support base 11 of the piezoelectric thin film 14.
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