Production of finely structured layer on substrate - applying intermediate layer with solubility varying as function of depth for selective dissolution

摘要

An auxiliary layer (2) of a soluble material is applied on the substrate, and removed in separate zones in accordance with the structure. A second layer is applied on the auxiliary layer and bared zones of the substrate, and the auxiliary layer dissolved, with parts of the second layer on the auxiliary layer also removed. The auxiliary layer is made of a material whose solubility at or near the surface (3) is lower than in deeper parts of it.