ETCHING METHOD AND MIXED GAS FOR ETCHING,申请号JP19760089399-传众专利搜索

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发明名称	ETCHING METHOD AND MIXED GAS FOR ETCHING
摘要
申请公布号	JPS5314572(A)	申请公布日期	1978.02.09
申请号	JP19760089399	申请日期	1976.07.26
申请人	MITSUBISHI ELECTRIC CORP	发明人	NAGATA KAZUSHI;KINOSHITA SHIGEJI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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