Liq. crystal cell with vertically mounter components - has substrate, electrode in form of coating with surface micromachined by ion beam permitting homogeneous tilted positioning

摘要

Liquid crystal cell has substrate, electrode in form of coating with surface micromachined by ion beam and liq. crystal on the coating. An alignment element is present on the machined surface of the coating, and a combination of the two leads to an inclined or a vertical alignment of the molecules of the liq. crystal. An ion source (12) has an inlet (14) for a suitable gas, e.g. argon and an outlet (16) for the ions which are formed in the gas. The ions are directed towards a target. A neutralizer (18) prevents the accumulation of positive charges on the target.