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发明名称
SECONDARY ELECTRON CONTROL METHOD OF FARADY CUP
摘要
申请公布号
JPS52104070(A)
申请公布日期
1977.09.01
申请号
JP19760019986
申请日期
1976.02.27
申请人
HITACHI LTD
发明人
SUKEGAWA MASAYOSHI;TAKEUCHI MASARU
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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