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发明名称
METHOD OF FORMING SILICON OXIDE FILM AND FIELD OXIDE FILM
摘要
申请公布号
JPH10144678(A)
申请公布日期
1998.05.29
申请号
JP19960292889
申请日期
1996.11.05
申请人
OKI ELECTRIC IND CO LTD
发明人
ARAKAWA TOMIYUKI
分类号
H01L21/316;H01L21/265;H01L21/76;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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