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经营范围
发明名称
BASE PLATE HOLDING DEVICE
摘要
申请公布号
JPH03174393(A)
申请公布日期
1991.07.29
申请号
JP19890313207
申请日期
1989.12.01
申请人
ANELVA CORP
发明人
HIRAMA HITOAKI
分类号
C30B23/08;C30B25/12;H01L21/203;H01L21/205
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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