| 摘要 |
PURPOSE:To surely and stably move and stop a work carrier bed, by providing an air slide system including a seal member which is attached to the lower surface of an elevating member to entirely surround an intake and discharge groove from outside thereof. CONSTITUTION:An air film is formed between a work pallete as a work carrier bed moving on a base 1, and the base. A cylinder 12 as an air-pressure chamber defined by a piston 11 as an elevating member is communicated through four bypass passages 10 with an intake and discharge hole 5 which is opened to the lower surface of the body of the pallete 2. There are provided eight rods 16 which enter and exit from through-holes 15 in the body of the pallete 2, and an endless seal member 17 which is positioned at one end of the rods 16 and which is adapted to project from the lower surface of the body of the pallete 2 and entirely surrounds an intake and discharge hole 7. The intake and discharge hole 7 is evacuated to be in a negative pressure condition, so that the lower surface of the body of the pallete 2 is closely contacted to the upper surface of the base 1.
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