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发明名称
ELECTROSTATIC CHUCK BOARD
摘要
申请公布号
JPH0442791(A)
申请公布日期
1992.02.13
申请号
JP19900145295
申请日期
1990.06.05
申请人
NIKON CORP
发明人
SHIMIZU HIROYASU;NAKASUJI MAMORU;SUZUKI SHOHEI
分类号
H02N13/00
主分类号
H02N13/00
代理机构
代理人
主权项
地址
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