| 摘要 |
PROBLEM TO BE SOLVED: To provide a filter capable of removing inevitable foreign matter and giving high purity gas. SOLUTION: Fine metal particles of <=10μm average particle diameter, short metal fibers, metal fibers of <=10μm fiber diameter or a combination of them is sintered to form a sintered porous body 2 and the surface of the porous body 2 including the surfaces of the inner walls of the pores and inevitable foreign matter sticking to the surfaces of the inner walls is coated with a liq.- soluble inorg. thin film material 3 to obtain the objective filter having <=1μm pore diameter and >=40% porosity. The porous body 2 is immersed in an inorg. thin film suspension 3A having <=10cps melt viscosity, the suspension is sucked into the pores in the porous body by evacuation and it is stuck and dried to produce the filter.
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