发明名称 METHOD FOR PROCESSING MEASURED DATA OF WORKPIECE
摘要 PURPOSE: To remarkably reduce the input trouble of measured data and to exactly recognize the processing tendency of a working device. CONSTITUTION: By designating all product lots A to D for which the same batch processing is performed in a working device 12 when the measured data measured in a measuring device 13 is inputted and inputting the measured data of the product lot A measured by the measuring device 13 in a host computer 11 for process control, measured data is automatically written in the data file of each product lot A to D. A flag designating measured data to be the object of a statistic processing is written in the data file of an arbitrary product lot, only the measured data of the data file to which this flag is added is selected and the statistic processing is performed in the host computer 11 for process control.
申请公布号 JPH08328608(A) 申请公布日期 1996.12.13
申请号 JP19950158630 申请日期 1995.05.31
申请人 SONY CORP 发明人 KAMEYA OSAMU
分类号 H01L21/66;B65G61/00;G05B15/02;G05B19/418;G06F17/40;G06Q50/00;G06Q50/04;H01L21/02 主分类号 H01L21/66
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