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发明名称
SILICON ACCELERATING SENSOR MANUFACTURING METHOD
摘要
申请公布号
KR0155140(B1)
申请公布日期
1998.10.15
申请号
KR19940008000
申请日期
1994.04.16
申请人
CHOE, SHI-YOUNG
发明人
CHOE, SHI-YOUNG;SONN, BYUNG-BOK
分类号
H01L29/84;(IPC1-7):H01L29/84
主分类号
H01L29/84
代理机构
代理人
主权项
地址
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