发明名称 Scanning probe microscope head design
摘要 A SPM head incorporates a probe and a cantilever on which the probe is mounted. The cantilever has a planar reflecting surface proximate a free end of the cantilever. The cantilever extends from a mechanical mount and a single-mode optical fiber is supported by the mechanical mount to provide a beam axis at an angle away from normal relative to the reflecting surface.
申请公布号 US9366695(B2) 申请公布日期 2016.06.14
申请号 US201514805679 申请日期 2015.07.22
申请人 Angstrom Science, Inc. 发明人 Erickson Andrew Norman;Ippolito Stephen Bradley;Hofstatter Kyle Alfred
分类号 G01Q20/02;G01Q60/24;G01Q60/38;G02B6/255;G02B6/26 主分类号 G01Q20/02
代理机构 代理人 Fischer Felix L.
主权项 1. A structure comprising: a probe; a cantilever on which the probe is mounted, said cantilever having a planar reflecting surface proximate a free end of the cantilever; a mechanical mount from which the cantilever extends and, a single-mode optical fiber; said single-mode optical fiber supported by the mechanical mount to provide a beam axis at an angle away from normal relative to the reflecting surface.
地址 Santa Barbara CA US
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