METHOD OF ANALYZING SURFACE MODIFICATION OF A SPECIMEN IN A CHARGED-PARTICLE MICROSCOPE

摘要

A method of investigating a specimen using a charged particle microscope, including:
Producing and storing a first image, of a first, initial surface of the specimen;In a primary modification step, modifying said first surface, thereby yielding a second, modified surface;Producing and storing a second image, of said second surface;Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.

主权项

1. A method of investigating a specimen using a charged-particle microscope comprising:
a specimen holder, for holding the specimen; a source, for producing a beam of charged-particle radiation; an illuminator, for directing said beam so as to irradiate a surface of the specimen; an imaging detector, for receiving a flux of radiation emanating from the specimen in response to said irradiation, so as to produce an image of at least part of said surface; an apparatus that can be invoked to modify said surface by performing thereon a process chosen from the group comprising material removal, material deposition, and combinations hereof, the method comprising: producing and storing a first image, of a first, initial surface of the specimen; in a primary modification step, invoking said apparatus so as to modify said first surface, thereby yielding a second, modified surface; producing and storing a second image, of said second surface; using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.