发明名称 DEVICE AND METHOD FOR SCRIBING A BOTTOM-SIDE OF A SUBSTRATE WHILE VIEWING THE TOP SIDE
摘要 A device includes a table surface defining a horizontal plane having an x-axis and a y-axis orthogonal to the x-axis and the x-axis and y-axis lie in the horizontal plane; a scribe mounted below the horizontal plane, the scribe further disposed to present at least a portion of the tip above the horizontal plane; a rail arranges parallel to the y-axis and movable in a direction parallel to the x-axis; a sample guide configured in relation to the horizontal plane so that the sample guide arranges parallel to the x-axis and movable in a direction parallel to the y-axis; a scribe stop guide configured in relation to the horizontal plane so that the scribe guide arranges parallel to the x-axis and movable in a direction parallel to the y-axis, whereby the sample guide moves independent of the scribe stop, the scribe stop further comprising a locking mechanism.
申请公布号 US2016379849(A1) 申请公布日期 2016.12.29
申请号 US201615191293 申请日期 2016.06.23
申请人 LatticeGear, LLC 发明人 Teshima Janet;Moyal Efrat
分类号 H01L21/67;B28D5/00;B25H7/04;H01L21/78 主分类号 H01L21/67
代理机构 代理人
主权项 1. A device configured to scribe a bottom side or surface of a sample or substrate while the substrate oriented with a top side facing up comprising: a substantially flat and planar table surface configured to receive the substrate, the table surface defining a horizontal plane having an x-axis and a y-axis orthogonal to the x-axis and the x-axis and y-axis lie in the horizontal plane, and further including a plurality of scale lines arranged parallel to y-axis; a scribe having a tip, the scribe mounted below the horizontal plane, the scribe further disposed to present at least a portion of the tip above the horizontal plane, the scribe further configured to adjust in angle relative to the horizontal plane and a height above the horizontal plane, or to retract below the horizontal plane; a rail configured in relation to the horizontal plane so that the rail arranges parallel to the y-axis and movable in a direction parallel to the x-axis whereby the sample can be moved relative to the x-axis in corresponding motion with the rail; a sample guide configured in relation to the horizontal plane so that the sample guide arranges parallel to the x-axis and movable in a direction parallel to the y-axis; and a scribe stop guide configured in relation to the horizontal plane so that the sample guide arranges parallel to the x-axis and movable in a direction perpendicular to the y-axis, whereby the sample guide moves independent of the scribe stop, the scribe top further including a locking mechanism to selectively fix the scribe stop at east a first position relative to the y-axis.
地址 Beaverton OR US