发明名称 |
DEVICE AND METHOD FOR SCRIBING A BOTTOM-SIDE OF A SUBSTRATE WHILE VIEWING THE TOP SIDE |
摘要 |
A device includes a table surface defining a horizontal plane having an x-axis and a y-axis orthogonal to the x-axis and the x-axis and y-axis lie in the horizontal plane; a scribe mounted below the horizontal plane, the scribe further disposed to present at least a portion of the tip above the horizontal plane; a rail arranges parallel to the y-axis and movable in a direction parallel to the x-axis; a sample guide configured in relation to the horizontal plane so that the sample guide arranges parallel to the x-axis and movable in a direction parallel to the y-axis; a scribe stop guide configured in relation to the horizontal plane so that the scribe guide arranges parallel to the x-axis and movable in a direction parallel to the y-axis, whereby the sample guide moves independent of the scribe stop, the scribe stop further comprising a locking mechanism. |
申请公布号 |
US2016379849(A1) |
申请公布日期 |
2016.12.29 |
申请号 |
US201615191293 |
申请日期 |
2016.06.23 |
申请人 |
LatticeGear, LLC |
发明人 |
Teshima Janet;Moyal Efrat |
分类号 |
H01L21/67;B28D5/00;B25H7/04;H01L21/78 |
主分类号 |
H01L21/67 |
代理机构 |
|
代理人 |
|
主权项 |
1. A device configured to scribe a bottom side or surface of a sample or substrate while the substrate oriented with a top side facing up comprising:
a substantially flat and planar table surface configured to receive the substrate, the table surface defining a horizontal plane having an x-axis and a y-axis orthogonal to the x-axis and the x-axis and y-axis lie in the horizontal plane, and further including a plurality of scale lines arranged parallel to y-axis; a scribe having a tip, the scribe mounted below the horizontal plane, the scribe further disposed to present at least a portion of the tip above the horizontal plane, the scribe further configured to adjust in angle relative to the horizontal plane and a height above the horizontal plane, or to retract below the horizontal plane; a rail configured in relation to the horizontal plane so that the rail arranges parallel to the y-axis and movable in a direction parallel to the x-axis whereby the sample can be moved relative to the x-axis in corresponding motion with the rail; a sample guide configured in relation to the horizontal plane so that the sample guide arranges parallel to the x-axis and movable in a direction parallel to the y-axis; and a scribe stop guide configured in relation to the horizontal plane so that the sample guide arranges parallel to the x-axis and movable in a direction perpendicular to the y-axis, whereby the sample guide moves independent of the scribe stop, the scribe top further including a locking mechanism to selectively fix the scribe stop at east a first position relative to the y-axis. |
地址 |
Beaverton OR US |