发明名称 |
Method for manufacturing substrate mounting table |
摘要 |
A method for manufacturing a substrate mounting table having a mounting surface for mounting a substrate thereon; a plurality of gas injection openings opened on the mounting surface to supply a gas toward the mounting surface; a gas supply channel for supplying a gas to the gas injection openings; and a thermally sprayed ceramic layer covering the mounting surface is provided. The method includes forming a removable film at least on inner wall portions of the gas supply channel facing the gas injection openings; forming the thermally sprayed ceramic layer on the mounting surface; and removing the film.
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申请公布号 |
EP1944800(A2) |
申请公布日期 |
2008.07.16 |
申请号 |
EP20070024203 |
申请日期 |
2007.12.13 |
申请人 |
TOKYO ELECTRON LTD. |
发明人 |
NAGAYAMA, NOBUYUKI;UEDA, TAKEHIRO;KOBAYASHI, YOSHIYUKI;OOHASHI, KAORU |
分类号 |
H01L21/687 |
主分类号 |
H01L21/687 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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