| 摘要 |
Provided is a thin-film electronic device manufacturing method that enables, when continuously manufacturing multiple thin-film electronic devices on a long resin substrate (30) by using a mask (22), manufacturing while suppressing generation of static electricity through charging caused by separation of the resin substrate (30) and the mask (22). The thin-film electronic device manufacturing method is characterized by continuously manufacturing multiple thin-film electronic devices in the length direction of the resin substrate (30) by depositing, on one of the surfaces of the long resin substrate (30), a patterned functional film through repeating of attaching/detaching of the mask (22) for forming a pattern in a vacuum, wherein, before or at the same time the functional film is deposited, a conductive film (23, 31) is formed on an area on the deposition surface where the thin-film electronic devices are not formed. |
