| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a miniaturizable pressure sensor having excellent sensitivity. Ž<P>SOLUTION: This pressure sensor has a housing 12; a diaphragm 32 sealing a base 22 of the housing 12 with one surface being a pressure-receiving surface; a force transfer means 34 connected to a center part of the other surface of the diaphragm 32 from inside the housing 12; and a pressure-sensitive element 38 using a force detection direction as a detection axis. A displacement direction of the force transfer means 34 and the direction of the detection axis are approximately orthogonal to the pressure-receiving surface, and one end of the pressure-sensitive element 38 is supported and fixed to the housing 12 through an adhering means, and the other end is supported and fixed similarly to the force transfer means 34, and the adhering means is an inorganic adhesive 40. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
