发明名称 EVAPORATION SOURCE, PROCESS FOR PRODUCING OPTICAL MEMBER, AND OPTICAL MEMBER
摘要 This invention provides an evaporation source comprising a nonwoven fabric formed of a silicon oxide-containing fiber for holding an organic vapor deposition material, characterized in that the thermal conductivity of the nonwoven fabric is 0.01 to 1.0 Wm-1K-1. There are also provided a process for producing an optical member, comprising the step of heating the above evaporation source to vapor deposit an organic vapor deposition material onto the surface of an optical member, and an optical member produced by the production process. There are further provided a process for producing an optical member, which can stably vapor deposit a vapor deposition material without a significant temperature change, can form a vapor deposited film having even film thickness and concentration, and can produce an optical member having high performance as a vapor deposited film at low cost, and an optical member and an evaporation source for use in them.
申请公布号 WO2009028389(A1) 申请公布日期 2009.03.05
申请号 WO2008JP64892 申请日期 2008.08.21
申请人 HOYA CORPORATION;MITSUISHI, TAKESHI;TAKAHASHI, YUKIHIRO 发明人 MITSUISHI, TAKESHI;TAKAHASHI, YUKIHIRO
分类号 C23C14/24;D04H1/42;G02B1/10;G02B1/11 主分类号 C23C14/24
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