| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously restrain sticking at the time of release and sticking at the time of driving occurring between a movable part of a MEM element and a control electrode opposed to it, without an expensive processing device. SOLUTION: A substrate with a control electrode 115 formed and an opposed electrode made of SUS 304 are immersed in an electrodeposition liquid (for example, INSULEED3020X, Nippon Paint Co., Ltd.) containing sulfonium ions including silicone-base polymer. A negative voltage is applied to the control electrode 115, and a positive voltage is applied to the opposed electrode. By the above-mentioned operations, a water-repellent organic insulating film forming material dispersed (dissolved) in an electrodeposition liquid is precipitated on a surface of the control electrode 115, to which the negative voltage is applied, so that a water-repellent organic insulating film 109 with a thickness of about 0.3μm is formed on the exposed surface of the control electrode 115. COPYRIGHT: (C)2008,JPO&INPIT
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