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经营范围
发明名称
FORMING METHOD FOR CONTACT PARTS IN PART OF SHALLOW DIFFUSED LAYER
摘要
申请公布号
JPS52154377(A)
申请公布日期
1977.12.22
申请号
JP19760071094
申请日期
1976.06.18
申请人
HITACHI LTD
发明人
KAWAMOTO HIROSHI
分类号
H01L21/033;H01L21/225;H01L21/336;H01L21/385;H01L29/08;H01L29/78
主分类号
H01L21/033
代理机构
代理人
主权项
地址
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