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发明名称
SPIN COATING METHOD
摘要
申请公布号
JPS5349955(A)
申请公布日期
1978.05.06
申请号
JP19760124620
申请日期
1976.10.18
申请人
FUJI PHOTO FILM CO LTD
发明人
FUJII ITSUO;SAKAWAKI SHINICHI;SATOU MASAMICHI
分类号
G03C1/74;B05C11/08;B05D1/40;G03F7/16;H01L21/027
主分类号
G03C1/74
代理机构
代理人
主权项
地址
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