ORGANIC ELECTROLUMINESCENCE ELEMENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an organic electroluminescence element and its manufacturing method, in which steepness of start-up of luminosity in the luminosity-to- voltage characteristic due to of rise of voltage, is relaxed, and high luminescence efficiency is acquired. SOLUTION: A metal oxide film 3 is formed on a hole injecting electrode 2. The hole injecting layer 4, which consists of an organic material, a luminescence layer 5, which consists of an organic material, an electron transportation layer 6, which consists of an organic material, are formed in order on the metal oxide film 3. An electron injecting electrode is formed on the electron transportation layer 6. The metal oxide film 3 consists of gallium oxide, tantalum oxide, lantern oxide, indium oxide, and tin oxide or platinum oxide. Thickness of the metal oxide film 3 is desirable to be 1Åto 100Å, more desirable to be 5Åor more and 20Åor less, and still more desirable to be about 10Å. The metal oxide film 3 is formed by the helicon sputtering method.