Method and apparatus for generating a proof-mass drive signal

摘要

A drive-mode oscillator module generates at least one proof-mass drive signal for use within a micro-electro-mechanical system (MEMS) device. The drive-mode oscillator module comprises at least one gain control component arranged to receive at least one proof-mass motion measurement signal, and to generate a digital modulation control signal based at least partly on the at least one proof-mass motion measurement signal, and at least one modulation component arranged to receive the digital amplitude modulation control signal, and to output at least one proof-mass drive signal. The at least one modulation component is arranged to digitally modulate the at least one proof-mass drive signal based at least partly on the received digital amplitude modulation control signal.

主权项

1. A drive-mode oscillator module for generating at least one proof-mass drive signal for use within a micro-electro-mechanical system (MEMS) device, the drive-mode oscillator module comprising:
at least one gain control component arranged to receive at least one proof-mass motion measurement signal, receive at least one reference amplitude signal, compare the at least one proof-mass motion measurement signal to the at least one reference amplitude signal, generate a digital modulation control signal based at least partly on the at least one proof-mass motion measurement signal, and output the digital modulation control signal comprising an indication of whether the at least one proof-mass motion measurement signal exceeds the at least one reference amplitude signal; and at least one modulation component arranged to receive the digital modulation control signal, and to output at least one proof-mass drive signal, wherein the at least one modulation component is arranged to digitally modulate the at least one proof-mass drive signal based at least partly on the received digital modulation control signal.