| 摘要 |
PURPOSE:To remarkably alleviate a disconnection of wirings of electrodes and an increase in the resistance by forming the wirings of the electrodes with a film of at least two laminated layers of the same material of different density of contained oxygen. CONSTITUTION:A film of at least two laminated layers 7, 8 of the same material of different density of contained oxygen is formed for wirings of an electrode. A mask pattern 3 is formed on the film. The exposed part of the film is etched with the pattern 3, and the side face of the layer 8 having relatively high oxygen density of the layers 7, 8 is formed inside from the side face of the layer 7 having relatively low oxygen density on the etched side face of the film. Then, stepwise or tapered electrode wirings 9, 10 are formed. The oblique angle of the side face of the electrode wirings is controlled to the desired value by suitably selecting the oxygen density and thickness of each layer. |
