| 摘要 |
A test system for testing semiconductor devices on a semiconductor wafer using a flexible membrane probe includes, a test system computer; at least one test head (12, 13) connected to the test system computer; and at least one test probe (18, 19, 20, 21), connected to the test head, the test probe having a plurality of flexible membranes (22, 23, 24, 25) with a number of contacts thereon in number equal to the number of contacts on all the devices on the semiconductor wafer. <IMAGE>
|
