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发明名称
Vorrichtung zum Aufbringen dünner Schichten auf ein Substrat.
摘要
申请公布号
DE59007150(D1)
申请公布日期
1994.10.20
申请号
DE19905007150
申请日期
1990.11.29
申请人
LEYBOLD AG, 63450 HANAU, DE
发明人
LUEFT, GEROLD, W-6460 GELNHAUSEN 2, DE
分类号
C23C14/34;C23C14/56;(IPC1-7):C23C14/56
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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