| 摘要 |
PURPOSE:To enhance the position detecting accuracy of semiconductor chip, by utilizing the fact that a frame is a magnetic material to equip an electric magnet for the compulsive removal of frame deformation. CONSTITUTION:An electric magnet constituted of an iron core 7 and coil 8 is buried in a support base 6 to form a sample base. When the frame is conducted at positioning, line of magnetic force flows through the iron core 7 and island of frame 2 as the magnetic paths to attract the island 2 to the iron core 7. As the result, the deformation of the island 2 is compulsively removed in close contact with the supprot base 6 so that the detection surface of the semicondutor chip 4 is properly opposed to the detector. Therefore, position detection is available without detection rate and decrease of detecting accuracy due to the deformation of the frame. |
