METHOD FOR MONITORING FILM THICKNESS AND DEVICE FOR FORMING FILM,申请号JP19890031321-传众专利搜索

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发明名称	METHOD FOR MONITORING FILM THICKNESS AND DEVICE FOR FORMING FILM
摘要
申请公布号	JPH02209488(A)	申请公布日期	1990.08.20
申请号	JP19890031321	申请日期	1989.02.10
申请人	TOSHIBA CORP	发明人	HAZUKI RIYOUICHI;WATASE MASAMI;KODERA MASAKO;WATANABE TORU
分类号	C23C20/04	主分类号	C23C20/04
代理机构		代理人
主权项
地址

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