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发明名称
BEAM ALIGNMENT DEVICE FOR A PARTICLE BEAM
摘要
申请公布号
GB1367940(A)
申请公布日期
1974.09.25
申请号
GB19710039626
申请日期
1971.08.24
申请人
PHILIPS ELECTRONIC ASSOCIATED INDUSTRIES LTD
发明人
分类号
H01J37/147;(IPC1-7):H01J29/54
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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