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发明名称
ION SOURCE
摘要
申请公布号
JPH05290749(A)
申请公布日期
1993.11.05
申请号
JP19920115481
申请日期
1992.04.07
申请人
NISSIN ELECTRIC CO LTD
发明人
INOUE DAISUKE;MAEKAWA HARUO;NOGAWA SHUICHI
分类号
H01J27/02;C23C14/46;C23C14/48;(IPC1-7):H01J27/02
主分类号
H01J27/02
代理机构
代理人
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地址
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