IMAGE PROCESSING DEVICE AND SUBSTRATE PRODUCTION SYSTEM

摘要

An object is to provide an image processing device capable of reducing the load of image processing while shortening the time required for the image processing which uses super-resolution processing. The image processing device is provided with a process determination section which determines an execution necessity of the super-resolution processing in relation to image data during execution of a production process for every type of target object, a super-resolution processing section which executes the super-resolution processing which uses a plurality of items of the image data according to determination results of the process determination section to generate high resolution data, and a state recognition section which recognizes a state of the target object based on, of the image data and the high resolution data, the one corresponding to the determination results of the process determination section.