发明名称 |
METHOD FOR VACUUM-COATING A SUBSTRATE WITH A TRANSPARENT, CONDUCTIVE METAL ALLOY OXIDE AND A TRANSPARENT, CONDUCTIVE LAYER MADE OF A METAL ALLOY OXIDE |
摘要 |
The invention relates to a method for depositing a transparent, conductive layer, comprising a host material and a doping material, on a substrate (2) within a vacuum chamber (1), wherein the host material is made of zinc oxide or indium oxide and the doping material comprises an oxide of at least one of the metallic or semimetallic elements from the main group III or IV, wherein oxygen and a precursor are introduced into the vacuum chamber (1) while the host material is being deposited by means of a physical vapor deposition process, wherein the precursor contains the at least one element from the main group III or IV and the concentration of the doping material has a gradient in the course of the layer thickness. The invention further relates to a transparent, conductive layer made of a metal alloy oxide. |
申请公布号 |
EP2526217(B1) |
申请公布日期 |
2017.02.15 |
申请号 |
EP20100795619 |
申请日期 |
2010.12.16 |
申请人 |
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung |
发明人 |
FAHLAND, Matthias;SCHÖNBERGER, Alexander;SCHÖNBERGER, Waldemar;STRAACH, Steffen;SCHILLER, Nicolas |
分类号 |
C23C14/00;C23C14/08;H01L31/0224 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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