发明名称 MOUNTING SYSTEM THAT MAINTAINS STABILITY OF OPTICS AS TEMPERATURE CHANGES
摘要 An optical system comprises a detector to determine one or more intensities of light impinging on one or more locations of the detector and an optical element to redirect light towards the detector along a detection axis. The detector and optical element are coupled together by three or more substantially flat flexures respectively defining three or more flexure planes parallel to the detection axis. The three or more substantially flat flexures prevent rotational movement of the optical element with respect to the detector with changes in temperature
申请公布号 US2017020637(A1) 申请公布日期 2017.01.26
申请号 US201615287641 申请日期 2016.10.06
申请人 Align Technology, Inc. 发明人 Boltanski Rami
分类号 A61C9/00;H05K5/02;H05K5/04;G02B3/00;A61B5/00;G02B26/10;G02B27/12;G01B11/24;A61B1/00;A61B1/247;H05K1/02;G02B7/00 主分类号 A61C9/00
代理机构 代理人
主权项 1. A scanner comprising: a light source to generate light; a microlens array to split the light into an array of light beams; a base; a detector, mounted to the base, comprising an array of sensors, wherein each sensor of the array of sensors determines an intensity of light impinging on the sensor; a beam splitter to transmit the array of light beams towards a target and redirect a reflected array of light beams from the target towards the detector along a detection axis in a first direction; and three or more flexures that couple the beam splitter to the base, wherein thermal expansion or contraction of the beam splitter with respect to at least one of the detector or the base bends each flexure of the three or more flexures in a respective second direction without bending the flexure in a respective third direction approximately perpendicular to the first direction and the respective second direction, wherein the three or more flexures maintain an alignment of the microlens array to the detector with changes in temperature.
地址 San Jose CA US