ROTATION MECHANISM, MACHINE TOOL, AND SEMICONDUCTOR MANUFACTURING DEVICE

摘要

A rotating mechanism includes a housing; a shaft; a bearing which rotatably supports the shaft; a first rotating member which is provided on a first end portion of the shaft and includes a protruding portion that protrudes outside the first hole in the radial direction thereof and to a side portion of the housing, the protruding portion being opposed to the side portion of the housing with a first gap having a predetermined size therebetween; a second rotating member which is provided on a second end portion of the shaft, protrudes outside the second hole in the radial direction thereof and is opposed to the housing on the side of the second end portion with a second gap having a predetermined size therebetween; a first opening which is open to the outside of the first hole of the housing in the radial direction thereof to be opposed to the first rotating member and extends along the circumferential direction of the first hole for supplying a gas to the first gap; and a second opening which is open to the outside of the second hole of the housing in the radial direction thereof to be opposed to the second rotating member and extends along the circumferential direction of the second hole for supplying a gas to the second gap.