发明名称 ROLL
摘要 Provided are a roll, a film forming apparatus, and a film forming method. The present invention provides a roll used in an apparatus which may transfer a substrate, e.g., a flexible substrate such as a plastic film and a fibrous or metallic web or film and may form a film on a surface of the substrate, a film forming apparatus including the roll, and a film forming method using the film forming apparatus.
申请公布号 EP2940182(A4) 申请公布日期 2016.07.27
申请号 EP20130857783 申请日期 2013.12.02
申请人 LG CHEM, LTD. 发明人 LEE, SEONG HWAN;KIM, DONG RYUL;HWANG, JANG YEON
分类号 C23C16/44;B65H20/02;B65H27/00;C23C16/458;H01L21/205 主分类号 C23C16/44
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