| 摘要 |
A temperature control device is provided with a setting value adjusting unit (12) which, for each control timing at which temperature control is implemented by a controller (1), multiplies together a derivative value ΔSV indicating the gradient of a temperature setting value SV, the setting of which is received using a target temperature setting unit (11), an integral time TIn of a PID calculation used by a two degree of freedom PID calculating unit (14) to calculate a manipulated variable MVn, and 1 minus a two degree of freedom factor a (1-a), and calculates an adjusted temperature setting value SV'n by adding the result of the multiplication (ΔSVn × TIn × (1-a)) to a temperature setting value SVn, the setting of which is received using the target temperature setting unit (11). By this means, the occurrence of a delay in the control temperature of a control target (17), relative to the temperature setting value SVn, can be suppressed even if the temperature setting value SVn of the control target (17) varies in the shape of a ramp. |
